Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy: Difference between revisions
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=== | ===An overview of the performance of the AFM: Nanoman=== | ||
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!style="background:silver; color:black" align="left"|Performance | !style="background:silver; color:black" align="left"|Performance | ||
|style="background:LightGrey; color:black"|Scan range xy||style="background:WhiteSmoke; color:black"| | |style="background:LightGrey; color:black"|Scan range xy| | ||
Up to 90 µm square | |style="background:WhiteSmoke; color:black"|Up to 90 µm square | ||
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
|style="background:WhiteSmoke; color:black"| | |style="background:LightGrey; color:black"|Scan range z | ||
1 µm (can go up to 6µm with special settings) | |style="background:WhiteSmoke; color:black"| 1 µm (can go up to 6µm with special settings) | ||
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
|style="background:WhiteSmoke; color:black"| | |style="background:LightGrey; color:black"|Resolution xy | ||
Down to 1.4 nm - accuracy better than 2% | |style="background:WhiteSmoke; color:black"|Down to 1.4 nm - accuracy better than 2% | ||
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
|style="background:WhiteSmoke; color:black"| | |style="background:LightGrey; color:black"|Resolution z | ||
<1 Å - accuracy better than 2% | |style="background:WhiteSmoke; color:black"|<1 Å - accuracy better than 2% | ||
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
|style="background:WhiteSmoke; color:black"| | |style="background:LightGrey; color:black"|Max. scan depth as a function of trench width W | ||
~1 for our standard probe. Can be improved to about 10 with the right probe | |style="background:WhiteSmoke; color:black"|~1 for our standard probe. Can be improved to about 10 with the right probe | ||
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!style="background:silver; color:black" align="left"|Hardware settings | !style="background:silver; color:black" align="left"|Hardware settings | ||
|style="background:LightGrey; color:black"|Tip radius of curvature | |style="background:LightGrey; color:black"|Tip radius of curvature | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"|Standrad probe: <12 nm | ||
Standrad probe: <12 nm | |||
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!style="background:silver; color:black" align="left"|Substrates | !style="background:silver; color:black" align="left"|Substrates | ||
|style="background:LightGrey; color:black"|Substrate size | |style="background:LightGrey; color:black"|Substrate size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"|Up to 6" | ||
Up to 6" | |||
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
|style="background:WhiteSmoke; color:black"| | | style="background:LightGrey; color:black"|Substrate material allowed | ||
In principle all materials | |style="background:WhiteSmoke; color:black"|In principle all materials | ||
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