Specific Process Knowledge/Lithography/EBeamLithography/2D detection system: Difference between revisions
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This is a short quick guide to operating the 2D mark detection system, the full manual from JEOL (30 pages) can be found here: '''[[:File:2D mark detecting 20171212.pdf]]''' | This is a short quick guide to operating the 2D mark detection system, the full manual from JEOL (30 pages) can be found here: '''[[:File:2D mark detecting 20171212.pdf]]''' | ||
'''Getting started''' | |||
* you need to make a reference image in the SEM mode, and save as '''reference''' | |||
[[image:SEM settings.jpg|400px]] | [[image:SEM settings.jpg|400px]] | ||