Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
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The results in the table below show that the errors are at or below the measurement uncertainty for the stitching tests using no flat alignment. In other words, the stage is accurate to within 100nm. | The results in the table below show that the errors are at or below the measurement uncertainty for the stitching tests using no flat alignment. In other words, the stage is accurate to within 100nm. | ||
<br/>When flat alignment is used, a rotation error of ~1.5ppm appears, along with a ~0.3µm misalignment and a +6ppm scaling of the Y axis. This | <br/>When flat alignment is used, a rotation error of ~1.5ppm appears, along with a ~0.3µm misalignment and a +6ppm scaling of the Y axis. This level of accuracy (which corresponds to approximately half a pixel) is what we can expect when the rotation compensation is applied, i.e. when aligning to a previously printed layer. | ||
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