Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
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The results in the table below show that the errors are at or below the measurement uncertainty for the stitching tests using no flat alignment. | The results in the table below show that the errors are at or below the measurement uncertainty for the stitching tests using no flat alignment. | ||
<br/>When flat alignment is used, a rotation error of ~1.5ppm appears, along with a ~0.3µm | <br/>When flat alignment is used, a rotation error of ~1.5ppm appears, along with a ~0.3µm misalignment and a +6ppm scaling of the Y axis. This is the level of accuracy we can expect when the rotation compensation is applied, i.e. when aligning to a previously printed layer. | ||
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