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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
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!colspan="2" align="center"|
!colspan="2" align="center"|
!Shift median [µm]
!Shift median [µm]
!Position error [µm]
!Misalignment [µm]
!Run-out [ppm]
!Run-out (gain) [ppm]
!Rotation [ppm]
!Rotation [ppm]
|-
|-
Line 97: Line 97:
!Shearing [mRad]
!Shearing [mRad]
!Shift median [µm]
!Shift median [µm]
!Position error [µm]
!Misalignment [µm]
!Run-out [ppm]
!Run-out (gain) [ppm]
!Rotation [ppm]
!Rotation [ppm]
|-
|-
Line 179: Line 179:
!Shearing [mRad]
!Shearing [mRad]
!Shift median [µm]
!Shift median [µm]
!Position error [µm]
!Misalignment [µm]
!Run-out [ppm]
!Run-out (gain) [ppm]
!Rotation [ppm]
!Rotation [ppm]
|-
|-
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