Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
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In the MA6-MLA overlay test, a mask from an existing design (GreenBelt METAL v2, dark field) is reused to print the first layer using the Aligner: MA6-2, and the sample is developed. The second layer is aligned and printed in Aligner: Maskless 01, using a design containing the vernier scales located at the corners of a ~90mm by ~3mm rectangle. For 2 mark alignment, the original alignment marks at X±~43mm are used. Since only two alignment marks exist in the original design, four corners (positioned in a ~30mm by ~30mm square pattern) are used for manual alignment in the 4 mark test. Using corners rather than crosses reduces the accuracy of the alignment, as the positions of corners are subject to shifts by the first print lithography. | In the MA6-MLA overlay test, a mask from an existing design (GreenBelt METAL v2, dark field) is reused to print the first layer using the Aligner: MA6-2, and the sample is developed. The second layer is aligned and printed in Aligner: Maskless 01, using a design containing the vernier scales located at the corners of a ~90mm by ~3mm rectangle. For 2 mark alignment, the original alignment marks at X±~43mm are used. Since only two alignment marks exist in the original design, four corners (positioned in a ~30mm by ~30mm square pattern) are used for manual alignment in the 4 mark test. Using corners rather than crosses reduces the accuracy of the alignment, as the positions of corners are subject to shifts by the first print lithography. | ||