Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
Appearance
| Line 191: | Line 191: | ||
| -1.5±0.25 | | -1.5±0.25 | ||
| 20.8±11.7 | | 20.8±11.7 | ||
| | | 2.78±5.89 | ||
|- | |- | ||
| Line 211: | Line 211: | ||
| -1.69±0.25 | | -1.69±0.25 | ||
| 18.7±11.7 | | 18.7±11.7 | ||
| | | 12.5±5.89 | ||
|- | |- | ||