Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
| Line 136: | Line 136: | ||
|'''Y''' | |'''Y''' | ||
| -12±1 | | -12±1 | ||
| -0. | | -0.22±0.15 | ||
| -0. | | -0.21±0.05 | ||
| 6. | | 6.44±2.33 | ||
| - | | -0.93±5.89 | ||
|} | |} | ||
| Line 136: | Line 136: | ||
|'''Y''' | |'''Y''' | ||
| -12±1 | | -12±1 | ||
| -0. | | -0.22±0.15 | ||
| -0. | | -0.21±0.05 | ||
| 6. | | 6.44±2.33 | ||
| - | | -0.93±5.89 | ||
|} | |} | ||