Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
Appearance
| Line 127: | Line 127: | ||
| 1±2 | | 1±2 | ||
|rowspan="2" align="center"|0.002±0.001 | |rowspan="2" align="center"|0.002±0.001 | ||
| | | -2.08±0.25 | ||
| | | -2.08±0.25 | ||
| - | | -3.78±11.7 | ||
| | | 0.56±1.53 | ||
|- | |- | ||