Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
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| Line 106: | Line 106: | ||
|NA | |NA | ||
|rowspan="2"|NA | |rowspan="2"|NA | ||
| - | | -2.08±0.25 | ||
| | | -2.07±0.25 | ||
| | | -2.28±11.7 | ||
| | | 1.02±1.67 | ||
|- | |- | ||
| Line 115: | Line 115: | ||
|'''Y''' | |'''Y''' | ||
| NA | | NA | ||
| -0. | | -0.33±0.18 | ||
| -0. | | -0.34±0.20 | ||
| | | 1.22±2.33 | ||
| 0. | | -0.46±5.89 | ||
|- | |- | ||