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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,530 edits
Line 85: Line 85:




{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
{|border="1" cellspacing="0" cellpadding="3" style="text-align:center;"  
|-
|-


|-
|-
|-style="background:silver; color:black"
|-style="background:silver; color:black"
!colspan="2" align="center"|
!colspan="2"|
!Scaling
!Scaling [ppm]
!Shearing [mRad]
!Median [µm]
!Median [µm]
!Error [µm]
!Error [µm]
Line 100: Line 101:
|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|rowspan="2" align="center"|No flat alignment
|rowspan="2"|2 alignment marks
(two samples)
(two samples)
|'''X'''
|'''X'''
|
|NA
|rowspan="2"|NA
| -0.03±0.05
| -0.03±0.05
| 0.01±0.05
| 0.01±0.05
Line 112: Line 114:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|'''Y'''
|'''Y'''
|
| NA
| -0.05±0.05
| -0.05±0.05
| -0.07±0.05
| -0.07±0.05
Line 120: Line 122:
|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|rowspan="2" align="center"|With flat alignment
|rowspan="2"|4 alignment marks
|'''X'''
|'''X'''
|
|
|rowspan="2" align="center"|0,0001
| 0.00±0.05
| 0.00±0.05
| 0.05±0.05
| 0.05±0.05
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