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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
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==Stitching==
==Stitching==


{|border="1" cellspacing="0" cellpadding="2" style="text-align:left;"  
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
|-
|-


Line 41: Line 41:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|X
|X
|-0.03±0.05
| -0.03±0.05
|0.01±0.05
| 0.01±0.05
|1.00±2.33
| 1.00±2.33
|0.00±1.18
| 0.00±1.18


|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|Y
|Y
|-0.05±0.05
| -0.05±0.05
|-0.07±0.05
| -0.07±0.05
|0.42±2.33
| 0.42±2.33
|0.00±1.18
| 0.00±1.18
 
|}
 
Test results:
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"
|-
 
|-
|-style="background:silver; color:black"
!
!Median [µm]
!Error [µm]
!Run-out [ppm]
!Rotation [ppm]
|-
 
|-
|-style="background:WhiteSmoke; color:black"
|X
|'-0.03±0.05
|0.01±0.05
|1.00±2.33
|0.00±1.18
 
|-
|-style="background:WhiteSmoke; color:black"
|110 nm oxide
|
|
|taran
|average of nine measurements (three measurements on three different samples)
 
|-
|-style="background:WhiteSmoke; color:black"
|Borofloat (glass)
|
|
|taran
|average of three measurements on one sample


|}
|}


==Overlay==
==Overlay==
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/Aligners/Aligner:_Maskless_01_processing"