Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
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=Alignment= | =Alignment= | ||
The alignment accuracy of the Aligner: Maskless 01 is a combination of the position accuracy of the stage, the accuracy of the alignment mark detection, and the accuracy of the pattern already on the wafer (first print). | The alignment accuracy of the Aligner: Maskless 01 is a combination of the position accuracy of the stage, the accuracy of the alignment mark detection, and the accuracy of the pattern already on the wafer (first print). | ||
<br/> By measuring the stitching accuracy between two layers printed on the same substrate (without unloading the substrate), we can assess the stage accuracy. By aligning to a pattern previously exposed by the Aligner: Maskless 01, we can assess the mark detection accuracy. And finally, by aligning to a pattern exposed on a mask aligner, we can assess the mask-less aligner's ability to compensate for any scaling and orthogonality errors between the two machines. | <br/> By measuring the stitching accuracy between two layers printed on the same substrate (without unloading the substrate), we can assess the stage accuracy. By aligning to a pattern previously exposed by the Aligner: Maskless 01, we can assess the mark detection accuracy. And finally, by aligning to a pattern exposed on a mask aligner, we can assess the mask-less aligner's ability to compensate for any scaling and orthogonality errors between the two machines. | ||
==Stitching== | ==Stitching== | ||
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;" | |||
|- | |||
|- | |||
|-style="background:silver; color:black" | |||
! | |||
!Median [µm] | |||
!Error [µm] | |||
!Run-out / Scaling [ppm] | |||
!Rotation [ppm] | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|X | |||
|-0.03±0.05 | |||
|0.01±0.05 | |||
|1.00±2.33 | |||
|0.00±1.18 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|Y | |||
|-0.05±0.05 | |||
|-0.07±0.05 | |||
|0.42±2.33 | |||
|0.00±1.18 | |||
|} | |||
==Overlay== | ==Overlay== | ||