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Specific Process Knowledge/Etch/KOH Etch: Difference between revisions

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Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
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*TEOS oxide from furnace: 300nm etched in 11 min
*TEOS oxide from furnace: 300nm etched in 11 min
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*Theoretical values:
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