Specific Process Knowledge/Thin film deposition/thermalevaporator: Difference between revisions

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	The main purpose for the thermal evaporator is to deposit Al for removing charging of the resist when doing EBL on isolating substrate.		The main purpose for the thermal evaporator is to deposit Al for removing charging of the resist when doing EBL on isolating substrate.

	It is not only usable for Al deposition. The thermal evaporator ~~have~~ room for two boats and ~~there by~~ the possibility to make thinfilms of two different metals. At the moment not that many metals have been test and made a recipe for. Right now is is only Al and Ag that can be used.		It is not only usable for Al deposition. The thermal evaporator has room for two boats and thereby the possibility to make thinfilms of two different metals. At the moment not that many metals have been test and made a recipe for. Right now is is only Al and Ag that can be used.