Specific Process Knowledge/Etch/ASE (Advanced Silicon Etch): Difference between revisions
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* Silicon | * Silicon | ||
*Thin layers of Silicon oxide and silicon nitride | |||
* Polymers such as polyimide, PDMS, PMMA, BCB and resists | * Polymers such as polyimide, PDMS, PMMA, BCB and resists | ||
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