Jump to content

Specific Process Knowledge/Etch/Wet III-V Etches: Difference between revisions

Choi (talk | contribs)
No edit summary
Choi (talk | contribs)
No edit summary
Line 9: Line 9:
<br>
<br>
It is very important that you dispose off chemicals and process waste according to DTU Danchip regulations and risk assessments for your work.
It is very important that you dispose off chemicals and process waste according to DTU Danchip regulations and risk assessments for your work.
 
[[Image:FH07.jpg|300x300px|right|thumb|'Fume hood 07' in cleanroom D3]]
<br>
<br>
For dry etching III-V materials see
For dry etching III-V materials see