Specific Process Knowledge/Etch/Wet III-V Etches: Difference between revisions
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It is very important that you dispose off chemicals and process waste according to DTU Danchip regulations and risk assessments for your work. | It is very important that you dispose off chemicals and process waste according to DTU Danchip regulations and risk assessments for your work. | ||
[[Image:FH07.jpg|300x300px|right|thumb|'Fume hood 07' in cleanroom D3]] | |||
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For dry etching III-V materials see | For dry etching III-V materials see | ||