Specific Process Knowledge/Back-end processing/Disco Saw: Difference between revisions
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=== | ===Overview of the performance Disco DAD321 Dicer=== | ||
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!style="background:silver; color:black;" align="left"|Purpose | !style="background:silver; color:black;" align="left"|Purpose | ||
|style="background:LightGrey; color:black"|Equipment for dicing out samples | |style="background:LightGrey; color:black"|Equipment for dicing out samples | ||
|style="background:WhiteSmoke; color:black"| | |||
*Pure Silicon samples | *Pure Silicon samples | ||
*Silicon bonded to Silicon | *Silicon bonded to Silicon | ||
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*Pyrex/Borofloat | *Pyrex/Borofloat | ||
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!style="background:silver; color:black" align="left"|Performance | !style="background:silver; color:black" align="left" valign="top" rowspan="5"|Performance | ||
|style="background:LightGrey; color:black"|X-axis cutting range | |style="background:LightGrey; color:black"|X-axis cutting range | ||
|style="background:WhiteSmoke; color:black"| | |||
192 mm | 192 mm | ||
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|style="background:LightGrey; color:black"|X-axis cut speed | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
0.1 - 300 mm/sec | 0.1 - 300 mm/sec | ||
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|style="background:LightGrey; color:black"|Y-axis cutting range | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
162 µm | 162 µm | ||
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|style="background:LightGrey; color:black"|Y-axis index step | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
0.0002 mm | 0.0002 mm | ||
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|style="background:LightGrey; color:black"|Y-axis single error | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
0.003 or less | 0.003 or less | ||
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ø76.2 mm | ø76.2 mm | ||
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!style="background:silver; color:black" align="left"|Substrates | !style="background:silver; color:black" align="left" valign="top" rowspan="2"|Substrates | ||
|style="background:LightGrey; color:black"|Substrate size | |style="background:LightGrey; color:black"|Substrate size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
up to 6" | up to 6" | ||
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| style="background:LightGrey; color:black"|Layers that can't be diced | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Thick metal (>0.75 mm) | *Thick metal (>0.75 mm) | ||