Specific Process Knowledge/Etch/Wet III-V Etches: Difference between revisions
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This is a collection of III-V wet-etches; the rates should be tested before use. Make sure you have the proper education in mixing of chemicals before use. Wet etching of III-V materials is primarily to be done in 'Fume hood 07: III-V acids/bases'. Contact information, risk assessment and manual regarding this fume hood can be found in LabManager: | This is a collection of III-V wet-etches; the rates should be tested before use. Make sure you have the proper education in mixing of chemicals before use. Wet etching of III-V materials is primarily to be done in 'Fume hood 07: III-V acids/bases'. Contact information, risk assessment and manual regarding this fume hood can be found in LabManager: | ||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=374 Fume hood 07 Info page in LabManager] | |||
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It is very important that you dispose off chemicals and process waste according to DTU Danchip regulations and risk assessments for your work. | It is very important that you dispose off chemicals and process waste according to DTU Danchip regulations and risk assessments for your work. | ||