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Specific Process Knowledge/Characterization/Probe station: Difference between revisions

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==Thickness measurer==
==Thickness measurer==
[[Image:probe_station2.jpg|thumb|300x300px|Thickness Measurer. Positioned in serviceroom CX1]]
[[Image:probe2.jpg|thumb|300x300px|Thickness Measurer. Positioned in serviceroom CX1]]


The purpose is to measure the thickness of wafers, depths of larger grooves or height of larger mesas.  
The purpose is to measure the thickness of wafers, depths of larger grooves or height of larger mesas.