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== <!-- Mask Design --> ==
== <!-- Mask Design --> ==
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DTU Danchip offers a Tool Package Training in Mask Design; the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom.  
DTU Danchip offers a Tool Package Training in Mask Design.  


The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's.
The course is for all users who intend to design their own masks for lithography.




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|-style="background:White; color:black; text-align:center"
|-style="background:White; color:black; text-align:center"
!colspan="2"|Dry Etch Tool Package Training
!colspan="2"|Mask Design Training
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'''Theoretical part'''
'''Theoretical part'''
* A 3-hour lecture. The next 3 hour lecture is on the '''21st of September''' from 9:00 to approximately 12. Sign up via: [https://doodle.com/poll/8nhebimzqy2cy2p8 Dry Etch TPT Lecture doodle]
* Self-study using screen cast videoes demonstrating the use of either CleWin og L-edit and an exercise where you a guide through the design of a mask.


'''Practical part'''
'''Practical part'''
* A 2-3 hour training session, max. 3 persons per session will be planed after the lecture
* An optional ½ hour Q&A session with an expert on mask layout. You can make an appointment after finishing the exercise.
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'''Theoretical part'''
'''Theoretical part'''
* The location of the lecture will be notified after you have signed up
* Anywhere you like. Internet access required.
'''Practical part'''
'''Practical part'''
* The training session takes place inside the cleanroom. The meeting point will be in The gowning area
*  
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!Qualified Prerequisites
!Qualified Prerequisites
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* Cleanroom safety course at DTU Danchip
* That you have passed the Danchip Introduction course  
* Admission to the cleanroom must be obtained before the training session
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'''Before the lecture'''
'''Before the lecture'''
*Watch the video:[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Introduction_to_Dry_Etch_Equipment-1080p.mp4 Introduction to Dry Etch Equipment]
* Watch the videos
'''Before training session'''
'''Before training session'''
* Watch the training video: TPT hands-on intro
*  
* Watch the screen cast video's for the ASE/AOE software:See below
* Watch the screen cast video's for the DRIE/ICP meat and III-V ICP:  See below
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!Course Responsible
!Course Responsible
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The Dry Etch Group at DTU Danchip.
Customer support at DTU Danchip.


If you have questions you can contact us by e-mailing [mailto:dryetch@danchip.dtu.dk dryetch@danchip.dtu.dk].  
If you have questions you can contact us by e-mailing [mailto:danchipsupport@danchip.dtu.dk danchipsupport@danchip.dtu.dk].  
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!Learning Objectives
!Learning Objectives
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*Know why and when to use dry etching
* Get acquainted with the either Clewin 5 or L-edit mask design programs
*Use the dry etchers without harming the machines
* practice how to
*Select the right instrument to use for his/her dry etch processing
**
*Select an appropriate etch recipe for his/her dry etch processing
** 
*Spot when the recipe needs to be tuned for his/her needs and
 
*Suggest relevant tuning parameters
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'''<big>Literature</big>'''
'''<big>Literature</big>'''
* No extra Literature at the moment
* No extra Literature at the moment
'''<big>Pre Lecture video</big>'''
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Introduction_to_Dry_Etch_Equipment-1080p.mp4 Introduction to Dry Etch Equipment 5min37s]
'''<big>Slides from Lecture</big>'''
-->
<!-- *Lecture slide show [[Media:TPT Dry etching 20170223.pptx]]
*Lecture slides with explanatory text included [[Media:TPT Dry etching with notes 20170223.pdf]] -->
<!--
*Lecture slide show [[Media:TPT Dry etching Aug2017.pptx]]
*Lecture slides with explanatory text included [[Media:TPT Dry etching Aug2017.pdf]]


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