LabAdviser/Courses: Difference between revisions
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== <!-- Mask Design --> == | |||
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DTU Danchip offers a Tool Package Training in Mask Design; the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom. | |||
The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's. | |||
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!colspan="2"|Dry Etch Tool Package Training | |||
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!Schedule | |||
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'''Theoretical part''' | |||
* A 3-hour lecture. The next 3 hour lecture is on the '''21st of September''' from 9:00 to approximately 12. Sign up via: [https://doodle.com/poll/8nhebimzqy2cy2p8 Dry Etch TPT Lecture doodle] | |||
'''Practical part''' | |||
* A 2-3 hour training session, max. 3 persons per session will be planed after the lecture | |||
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!Location | |||
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'''Theoretical part''' | |||
* The location of the lecture will be notified after you have signed up | |||
'''Practical part''' | |||
* The training session takes place inside the cleanroom. The meeting point will be in The gowning area | |||
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!Qualified Prerequisites | |||
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* Cleanroom safety course at DTU Danchip | |||
* Admission to the cleanroom must be obtained before the training session | |||
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!Preparations | |||
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'''Before the lecture''' | |||
*Watch the video:[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Introduction_to_Dry_Etch_Equipment-1080p.mp4 Introduction to Dry Etch Equipment] | |||
'''Before training session''' | |||
* Watch the training video: TPT hands-on intro | |||
* Watch the screen cast video's for the ASE/AOE software:See below | |||
* Watch the screen cast video's for the DRIE/ICP meat and III-V ICP: See below | |||
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!Course Responsible | |||
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The Dry Etch Group at DTU Danchip. | |||
If you have questions you can contact us by e-mailing [mailto:dryetch@danchip.dtu.dk dryetch@danchip.dtu.dk]. | |||
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!Learning Objectives | |||
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*Know why and when to use dry etching | |||
*Use the dry etchers without harming the machines | |||
*Select the right instrument to use for his/her dry etch processing | |||
*Select an appropriate etch recipe for his/her dry etch processing | |||
*Spot when the recipe needs to be tuned for his/her needs and | |||
*Suggest relevant tuning parameters | |||
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===Material for preparations and further information=== | |||
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'''<big>Literature</big>''' | |||
* No extra Literature at the moment | |||
'''<big>Pre Lecture video</big>''' | |||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Introduction_to_Dry_Etch_Equipment-1080p.mp4 Introduction to Dry Etch Equipment 5min37s] | |||
'''<big>Slides from Lecture</big>''' | |||
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<!-- *Lecture slide show [[Media:TPT Dry etching 20170223.pptx]] | |||
*Lecture slides with explanatory text included [[Media:TPT Dry etching with notes 20170223.pdf]] --> | |||
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*Lecture slide show [[Media:TPT Dry etching Aug2017.pptx]] | |||
*Lecture slides with explanatory text included [[Media:TPT Dry etching Aug2017.pdf]] | |||
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'''<big>Pre hands-on training videos</big>'''<br> | |||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/TPThands-on_IntroAndWafer_extra-720p.mp4 TPT hands-on intro 6min6s] | |||
Screen cast videos for the DRIE, ICP metal and III-V ICP: | |||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Overview_HiRes-720p.mp4 Overview 3min25s] | |||
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=19b8e1bfcd514c0e01eee7df416a0449&cHash=94480d4d38ce36a2a7621cdfab1054b2 Running processes] | |||
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=ac1c07ec933f7f138ec1788569cd568e&cHash=e73d3b0cc4fd5f8763c0c42d96bc7adc Recipes] | |||
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=ef3a91e929cce443fb2388bae35acf41&cHash=7d104e10f1da36ec01097059d6ee441b The Bosch Processes] | |||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Automatic_Processing_DRIE-720p.mp4 Automatic processing at the DRIE-Pegasus 14min56s] | |||
Screen cast videos for the ASE and AOE: | |||
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=3c9e59310178de0c548d437712f077c2&cHash=e8c7fe4f4ff14672c970a94ec093cb8e Intro] | |||
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=3ec3324cdd5df30e38c4215e138c0f3b&cHash=fee573a639b0f5b6cfd1cd058b8376ec Load and Transfer] | |||
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=5dc5bdbcc2842364c6bcb23735cd42e0&cHash=f046044c1603f61fd6af4e0b0264955b Recipe Editor] | |||
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=372bc3286dcee3303214c268e14e5663&cHash=ae70bb52ca1c611c9fc7602bcd613ec5 The Bosch Process] | |||
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=b4deb2d0030f3141f41a4497375bf861&cHash=a75fab158fec382198b74336cba7bdc4 Run a Process] | |||
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=b995b7088690f218f73c24a6bd6361ad&cHash=c6076806edcff2f12036b4e41cbee14d Removing a Wafer from the Load Lock] | |||
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=742052c10f9e77778ffab73561b9e840&cHash=44832011bb363b1162900338c834c785 The Process Log] | |||
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==The Dry Etch TPT == | ==The Dry Etch TPT == |
Revision as of 10:57, 13 September 2017
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Courses
We are building up a number of courses to educate our users in using the cleanroom facility and the equipment inside. Below you can see the courses that are presently running. The "Cleanroom introduction Course" is mandatory for all users that need to enter the cleanroom facility on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use inside the facility.
The Cleanroom Introduction Course
For information regarding the Introduction Course, please take a look at the DTU Danchip homepage, a direct link is given here: [1]
The Lithography TPT
DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom.
The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
Lithography Tool Package Training | |
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Schedule |
Theoretical part
Practical part
|
Location |
Theoretical part
Practical part
|
Qualified Prerequisites |
|
Preparations |
Before the "questions and exercises" session
Before training session
Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the section below. |
Course Responsible |
The Lithography Group at DTU Danchip lithography@danchip.dtu.dk. Sign up for the course using Doodle (links under schedule). |
Learning Objectives |
|
Material for preparations and further information
Literature
|
Training videos
|
The Dry Etch TPT
DTU Danchip offers a Tool Package Training in Dry etching; the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom.
The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's.
Dry Etch Tool Package Training | |
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Schedule |
Theoretical part
Practical part
|
Location |
Theoretical part
Practical part
|
Qualified Prerequisites |
|
Preparations |
Before the lecture
Before training session
|
Course Responsible |
The Dry Etch Group at DTU Danchip. If you have questions you can contact us by e-mailing dryetch@danchip.dtu.dk. |
Learning Objectives |
|
Material for preparations and further information
Literature
|
Pre hands-on training videos Screen cast videos for the DRIE, ICP metal and III-V ICP:
Screen cast videos for the ASE and AOE:
|
The SEM TPT
DTU Danchip offers a Tool Package Training in Scanning electron microscope (SEM); the course includes theory on SEM, as well as training in instrument operation.
The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM at Danchip.
SEM Tool Package Training | |
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Schedule |
Theoretical part
Practical part
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Location |
Theoretical part
Practical part
|
Qualified Prerequisites |
|
Preparations |
Before the lecture
Before the first group training session
Before the one-on-one hands-on
|
Course Responsible |
The SEM Group at DTU Danchip (SEM@danchip.dtu.dk). Sign up for the course by e-mailing to sem@danchip.dtu.dk. |
Learning Objectives |
|
Material for preparations and further information
Slides from Lecture
- Lecture slide show Media:Danchip_SEM_lecture.pptx