Specific Process Knowledge/Characterization/Optical microscope: Difference between revisions
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|Wollastron prism | |Wollastron prism | ||
|Motorized stage | |Motorized stage | ||
[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|auto scan guide]] | |||
|No | |No | ||
|No | |No | ||
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It is possible to make an automated scanning of a full wafer on the Nikon Eclipse L200 with motorized stage (located in D-3) '''[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|Nikon Eclipse L200 auto scan guide]]''' | |||
Revision as of 12:57, 22 August 2017
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| Zeiss Jenatech (strain) | Nikon SMZ 1500 | Leica S8 APO | Leitz Medilux | Zeiss Axiotron 2 | Zeiss Jenatech (particles measurements) | Noco IR microscope | Nikon SMZ 1000 | Nikon ME 600 | Nikon Eclipse L200 | Nikon Eclipse L200 (2) | Nikon ECLIPSE L200N 3 | Nikon ECLIPSE L200N 4 | |
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| Location | Cleanroom F-1 | Cleanroom E-5 | Cleanroom D-3 | Cleanroom D-3 | Cleanroom F-3 | Cleanroom B-1 | Cleanroom A-5 | Cleanroom A-5 | Cleanroom A-5 | Cleanroom D-3 | Cleanroom C-1 | Cleanroom E-4 | Cleanroom E-5 |
| Special features | Wollastron prism | Stereoscopic microscope | Stereoscopic microscope | No | No | No | Infra red (IR) camera | Stereoscopic microscope | Wollastron prism | Motorized stage | No | No | No |
| Ocular magnification | 10x | No | No | 10x | 10x | 10x | 10x | No | 10x | 10x | 10x | 10x | 10x |
| Objective magnification | 2.5x, 5x, 10x, 20x, 50x | Zoom 100x | Zoom 80x | 2.5x, 5x, 10x, 20x, 50x | 5x, 10x, 20x, 50x | 5x, 10x, 20x, 50x, 100x | 2.5x, 5x, 20x, 50x | Zoom 100x | 5x, 10x, 20x, 50x, 100x | 2.5x, 5x, 10x, 20x, 50x, 100x | 2.5x, 5x, 10x, 20x, 50x | 2.5x, 5x, 10x, 20x, 50x, 100x | 2.5x, 5x, 10x, 20x, 50x, 100x |
| Bright field | Yes | No | No | Yes | Yes | Yes | Yes | No | Yes | Yes | Yes | Yes | Yes |
| Dark field | Yes | No | No | No | Yes | Yes | No | No | Yes | Yes | Yes | Yes | Yes |
| Polarizer | Yes | No | No | No | No | Yes | No | No | Yes | No | No | No | No |
| Episcopic light (reflected light) | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes |
| Diascopic light (transmitted light) | No | Yes | No | Yes | Yes | No | Yes | No | No | Yes | Yes | Yes | Yes |
| View with eye | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes |
| View on screen (camera) | Yes | No | No | Yes | Yes | No | Yes (IR) | No | Yes | Yes | Yes | Yes | Yes |
| Measurement option | No | No | No | No | Yes | No | No | No | No | Yes | Yes | Yes | Yes |
It is possible to make an automated scanning of a full wafer on the Nikon Eclipse L200 with motorized stage (located in D-3) Nikon Eclipse L200 auto scan guide