Specific Process Knowledge/Etch/Wet Aluminium Etch: Difference between revisions
| Line 13: | Line 13: | ||
Wet etching of aluminium is done with two different solutions: | Wet etching of aluminium is done with two different solutions: | ||
# H<sub>2</sub>O : H<sub>3</sub>PO<sub>4</sub> (1:2) at | # H<sub>2</sub>O : H<sub>3</sub>PO<sub>4</sub> (1:2) at 50°C | ||
# Pre-mixed etch solution: PES 77-19-04 at | # Pre-mixed etch solution: PES 77-19-04 at 20°C | ||
<br> | <br> | ||