Specific Process Knowledge/Etch/Wet Aluminium Etch: Difference between revisions
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!Batch size | !Batch size | ||
|1-25 wafers at a time | |1-25 wafers at a time | ||
| | |Flexible | ||
|- | |- | ||
| Line 83: | Line 83: | ||
!Batch size | !Batch size | ||
|1-25 wafers at a time | |1-25 wafers at a time | ||
| | |Flexible | ||
|- | |- | ||