Specific Process Knowledge/Etch/Wet Aluminium Etch: Difference between revisions
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!Location | !Location | ||
| | |[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=381 Aluminium Etch] bath inside [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=413 Wet Bench 05] in D-3 | ||
|Beaker in Fumehood 01 or 02 | |Beaker in Fumehood [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=368 01] or [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=369 02] in D-3 | ||
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!Size of substrate | !Size of substrate | ||
|4" wafers | |4" wafers | ||
6" wafers | |||
|Any size that fits in beaker | |||
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!Allowed materials | !Allowed materials | ||
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See the [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=381 Cross Contamination Sheet] for Aluminium Etch bath | |||
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Any material allowed in cleanroom | |||
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