Specific Process Knowledge/Etch/Wet Aluminium Etch: Difference between revisions
| Line 9: | Line 9: | ||
=Wet Aluminium Etch= | =Wet Aluminium Etch= | ||
[[Image:BHF-PolySi-Al-etch.JPG|300x300px|thumb| | [[Image:BHF-PolySi-Al-etch.JPG|300x300px|thumb|Aluminium Etch bath located in left side of Wet bench 05 in cleanroom D-3]] | ||
Wet etching of aluminium is done with two different solutions: | Wet etching of aluminium is done with two different solutions: | ||