Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
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Silicon, glass, and polymer substrates | Silicon, glass, and polymer substrates | ||
III-V materials on silicon carrier | |||
Film or pattern of all but types, except type IV and resist/polymer | Film or pattern of all but types, except type IV and resist/polymer | ||
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Silicon, glass, and polymer substrates | Silicon, glass, and polymer substrates | ||
III-V materials on silicon carrier | |||
Film or pattern of all but types, except type IV and resist/polymer | Film or pattern of all but types, except type IV and resist/polymer | ||