Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE magnetic stack etch: Difference between revisions

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	==Results of Design of Experiments optimization of magnetic stack etching (~~[mailto:kristian.rasmussen~~@nanotech.dtu.dk ~~Kristian Hagsted Rasmussen]~~ spring 2011)==		==Results of Design of Experiments optimization of magnetic stack etching (Kristian Hagsted Rasmussen@nanotech.dtu.dk spring 2011)==