Specific Process Knowledge/Etch/DRIE-Pegasus/nanobosch/nanobosch6: Difference between revisions
Appearance
| Line 1: | Line 1: | ||
<!-- Ok, jmli 20170627 --> | |||
<!-- Ok, jmli 20170627 --> | <!-- Ok, jmli 20170627 --> | ||
== Test run using AZ resist 24/9-2012 == | == Test run using AZ resist 24/9-2012 == | ||