Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride: Difference between revisions
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*Several smaller samples | *Several smaller samples | ||
*1- | *1-7 50 mm wafers | ||
*1 | *1 100 mm wafers | ||
*1 150 mm wafer | *1 150 mm wafer | ||
Depending on what PECVD you use | Depending on what PECVD you use | ||