Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride: Difference between revisions
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*Si<sub>x</sub>N<sub>y</sub>H<sub>z</sub> | *Si<sub>x</sub>N<sub>y</sub>H<sub>z</sub> | ||
*Si<sub>x</sub>O<sub>y</sub>N<sub>z</sub>H<sub>v</sub> | *Si<sub>x</sub>O<sub>y</sub>N<sub>z</sub>H<sub>v</sub> | ||
Silicon nitride can be doped with boron | Silicon nitride can be doped with boron or phosphorus | ||
|Unknown | |Unknown | ||
|- | |- | ||