Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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*and many more | *and many more | ||
|- | |- | ||
|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
|style="background:LightGrey; color:black"|Film thickness range | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*~20Å to 2 µm (depending of the material) | *~20Å to 2 µm (depending of the material) | ||
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*One sample at a time - all sample larger than about 1x1 cm<sup>2</sup>sizes up to about 6" | *One sample at a time - all sample larger than about 1x1 cm<sup>2</sup>sizes up to about 6" | ||
|- | |- | ||
|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
| style="background:LightGrey; color:black"|Substrate material allowed | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*In principle all materials | *In principle all materials | ||