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Specific Process Knowledge/Etch/Etching of Polymer/Polymer Etch by ASE: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
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| Etched
| Etched
| O<sub>2</sub>
| O<sub>2</sub>
| CO<sub>2</sub>
| CO<sub>2</sub> (no available anymore)
| SF<sub>6</sub>
| SF<sub>6</sub>
| He/Ar
| He/Ar
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