Specific Process Knowledge/Characterization/Drop Shape Analyzer: Difference between revisions
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|style="background:LightGrey; color:black"|Available liquids | |style="background:LightGrey; color:black"|Available liquids | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Syringe 1: Water ( | *Syringe 1: Water (H<sub>2</sub>O) | ||
*Syringe 2: Diiodo-methane ( | *Syringe 2: Diiodo-methane (CH<sub>2</sub>I<sub>2</sub>) | ||
*Syringe 3: Benzyl alcohol ( | *Syringe 3: Benzyl alcohol (C<sub>6</sub>H<sub>5</sub>CH<sub>2</sub>OH) | ||
*Syringe 4: Available | *Syringe 4: Available | ||
*Manual dispense is also possible | *Manual dispense is also possible | ||
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|style="background:LightGrey; color:black"|Substrate size | |style="background:LightGrey; color:black"|Substrate size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Up to 6" wafers. In order to measure, a few | *Up to 6" wafers. In order to measure, a few mm<sup>2</sup> of flat surface is required. | ||
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||