Specific Process Knowledge/Thermal Process/Annealing: Difference between revisions
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*Wet anneal with H<math>_2</math>O in a bubbler can be done in furnaces:C2 and C3. | *Wet anneal with H<math>_2</math>O in a bubbler can be done in furnaces:C2 and C3. | ||
== | ==Comparison of the seven annealing equipments== | ||
{| {{table}} border="2" cellspacing="0" cellpadding="8" width="1000pt" | {| {{table}} border="2" cellspacing="0" cellpadding="8" width="1000pt" | ||
| valign="top" align="center" style="background:#f0f0f0;"| | | valign="top" align="center" style="background:#f0f0f0;"| | ||
| valign="top" align="center" style="background:#f0f0f0;"|'''A1 <br /> Boron drive-in''' | | valign="top" align="center" style="background:#f0f0f0;"|'''A1 <br /> Boron drive-in''' | ||
| valign="top" align="center" style="background:#f0f0f0;"|'''A3 <br />Phosphorous drive-in''' | | valign="top" align="center" style="background:#f0f0f0;"|'''A3 <br />Phosphorous drive-in''' | ||