Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
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*Wet oxide with H<math>_2</math>O in a bubbler can be grown in furnaces: C1,C2,C3,D1. | *Wet oxide with H<math>_2</math>O in a bubbler can be grown in furnaces: C1,C2,C3,D1. | ||
== | ==Comparison of the six oxidation furnaces== | ||
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