Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
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The following techniques for elemental analysis are available at Danchip. | The following techniques for elemental analysis are available at Danchip. | ||
* EDX | * EDX | ||
* SIMS | * SIMS (no longer available at Danchip) | ||
* XPS (ESCA) | * XPS (ESCA) | ||
In the table below the three techniques are compared | In the table below the three techniques are compared | ||