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| '''<big>Slides from Lecture</big>''' | | '''<big>Slides from Lecture</big>''' |
| *[[:Media:Litho_Tool_Package_-_Introduction.pdf|TPT slides: Introduction]] | | *Lecture slide show [[Media:TPT Dry etching 20170223.pptx]] |
| *[[:Media:Litho_Tool_Package_-_Spin_coating.pdf|TPT slides: Spin Coating]]
| | *Lecture slides with explanatory text included [[Media:TPT Dry etching with notes 20170223.pdf]] |
| *[[:Media:Litho_Tool_Package_-_Exposure.pdf|TPT slides: UV Exposure]] | |
| *[[:Media:Litho_Tool_Package_-_Development.pdf|TPT slides: Development]]
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| *[[:Media:Litho_Tool_Package_-_Post_processing.pdf|TPT slides: Post-processing]]
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| *[[:Media:Litho_Tool_Package_-_Process_effects_and_examples.pdf|TPT slides: Process Effects and Examples]]
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