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| *[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=742052c10f9e77778ffab73561b9e840&cHash=44832011bb363b1162900338c834c785 The Process Log] | | *[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=742052c10f9e77778ffab73561b9e840&cHash=44832011bb363b1162900338c834c785 The Process Log] |
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| '''<big>Manuals</big>'''
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| *Automatic Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=359 Spin Coater: Gamma UV]
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| *Manual Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=331 Spin Coater: Manual Standard Resists]
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| *UV Mask Aligner: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=339 Aligner: MA6 - 2] or [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=44 KS Aligner]
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| *Automatic Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=329 Developer: TMAH UV-lithography]
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| *Manual Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=324 Developer: TMAH Manual]
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