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==The Dry Etch TPT [[image:Under_construction.png|70px]] ==
==The Dry Etch TPT [[image:Under_construction.png|70px]] ==
DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom.
The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
{|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 70%;"
|-
|-
|-style="background:White; color:black; text-align:center"
!colspan="2"|Lithography Tool Package Training
|-
|-
!Schedule
|
<!--'''<span style="color: red;">OBS: The December Litho TPT has been cancelled due to sickness. Contact the Lithography Group for rescheduling if this poses a problem.</span>''' <span style="text-decoration: line-through;">'''NEXT LECTURE: Tuesday 29th of November 9:15 - 13:00 (B347, Seminar room)'''</span>-->
'''Theoretical part'''
* The lecture has been replaced by videos that can be viewed at one's leisure.
* A 1 hour "questions and exercises" session once or twice a month will be planned as needed (typically Fridays 09:30-10:30).
* NEXT "questions and exercises" sessions: '''31st of March, 21st of April, 28th of April, 19th of May'''
'''Practical part'''
* A 4-5 hour training session 2-3 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 14:00).
* NEXT training sessions: '''5th of April, 26th of April, 3rd of May, 24th of May'''
|-
|-
!Location
|
'''Theoretical part'''
* The location of the "questions and exercises" session will be specified after signing up for the course.
'''Practical part'''
* The training session takes place inside the cleanroom. The meeting point will be in front of the first equipment.
|-
|-
!Qualified Prerequisites
|
* Cleanroom safety course at DTU Danchip
* Admission to the cleanroom must be obtained before the training session
|-
|-
!Preparations
|
'''Before the "questions and exercises" session'''
* Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus)
* Watch the [http://podcast.llab.dtu.dk/index.php?id=302 lecture videos] (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos.
'''Before training session'''
* Watch the training videos of spin coating (automatic), exposure (operation, and alignment), and development (automatic).
* Study the equipment manuals. The manuals are available in LabManager.
* Study the TPT process flows (first print, and alignment).
'''Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the section below.
|-
|-
!Course Responsible
|
The Lithography Group at DTU Danchip.
Sign up for the course by e-mailing to [mailto:lithography@danchip.dtu.dk lithography@danchip.dtu.dk].
|-
|-
!Learning Objectives
|
* Describe fundamental parts of lithographic processing in a cleanroom, design of process flows
* Authorization to use spin coater, mask aligner, and developer at DTU Danchip
* Calculate relevant process parameters
* Analyze and apply your results of lithographic processing
|-
|}
<br clear="all" />
===Material for preparations and further information===
{| style="color: black;" width="90%"
| colspan="3" |
|-
| style="width: 20%"|
'''<big>Literature</big>'''
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf  Franssila, 2010, Chapter 9: Optical Lithography]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch10/pdf Franssila, 2010, Chapter 10: Advanced Lithography]
*[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals]
*[http://www.microchemicals.com/downloads/application_notes.html Application Notes from MicroChemicals]
'''<big>Lecture videos</big>'''
*[http://podcast.llab.dtu.dk/index.php?id=302 Lecture videos] (7 videos, 2:41 hours in total)
'''<big>Slides from Lecture</big>'''
*[[:Media:Litho_Tool_Package_-_Introduction.pdf|TPT slides: Introduction]]
*[[:Media:Litho_Tool_Package_-_Spin_coating.pdf‎|TPT slides: Spin Coating]]
*[[:Media:Litho_Tool_Package_-_Exposure.pdf|TPT slides: UV Exposure]]
*[[:Media:Litho_Tool_Package_-_Development.pdf‎|TPT slides: Development]]
*[[:Media:Litho_Tool_Package_-_Post_processing.pdf‎|TPT slides: Post-processing]]
*[[:Media:Litho_Tool_Package_-_Process_effects_and_examples.pdf|TPT slides: Process Effects and Examples]]
| style="width: 20%"|
'''<big>Training videos</big>'''
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.055_Spin_Coater_GAMMA_UV-720p.mp4 Training Video: Automatic Spin Coater]
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.057_Manual_Spin_Coater_V2-720p.mp4 Training Video: Manual Spin Coater]
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part1_operation-720p.mp4 Training Video: UV Mask Aligner Part I (Operation)]
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part2_aligning-720p.mp4 Training Video: UV Mask Aligner Part II (Alignment)]
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.050_Developer_TMAH_UV-Lithography-720p.mp4 Training Video: Automatic Puddle Developer]
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.049_Developer_Manual-720p.mp4 Training Video: Manual Puddle Developer]
'''<big>Manuals</big>'''
*Automatic Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=359 Spin Coater: Gamma UV]
*Manual Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=331 Spin Coater: Manual Standard Resists]
*UV Mask Aligner: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=339 Aligner: MA6 - 2] or [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=44 KS Aligner]
*Automatic Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=329 Developer: TMAH UV-lithography]
*Manual Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=324 Developer: TMAH Manual]
'''<big>Process Flows</big>'''
*[[:Media:Process_Flow_TPT first print.pdf|TPT first print process flow]]
*[[:Media:Process_Flow_TPT alignment.pdf|TPT alignment process flow]]
| style="width: 20%"|
|}
<br clear="all" />


==The SEM TPT [[image:Under_construction.png|70px]] ==
==The SEM TPT [[image:Under_construction.png|70px]] ==

Revision as of 11:16, 23 March 2017

Feedback to this page: click here


Courses

We are building up a number of courses to educate our users in using the cleanroom facility and the equipment inside. Below you can see the courses that are presently running. The "Cleanroom introduction Course" is mandatory for all users that need to enter the cleanroom facility on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use inside the facility.

The Cleanroom Introduction Course

For information regarding the Introduction Course, please take a look at the DTU Danchip homepage, a direct link is given here: [1]

The Lithography TPT

DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom.

The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.


Lithography Tool Package Training
Schedule

Theoretical part

  • The lecture has been replaced by videos that can be viewed at one's leisure.
  • A 1 hour "questions and exercises" session once or twice a month will be planned as needed (typically Fridays 09:30-10:30).
  • NEXT "questions and exercises" sessions: 31st of March, 21st of April, 28th of April, 19th of May

Practical part

  • A 4-5 hour training session 2-3 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 14:00).
  • NEXT training sessions: 5th of April, 26th of April, 3rd of May, 24th of May
Location

Theoretical part

  • The location of the "questions and exercises" session will be specified after signing up for the course.

Practical part

  • The training session takes place inside the cleanroom. The meeting point will be in front of the first equipment.
Qualified Prerequisites
  • Cleanroom safety course at DTU Danchip
  • Admission to the cleanroom must be obtained before the training session
Preparations

Before the "questions and exercises" session

  • Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus)
  • Watch the lecture videos (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos.

Before training session

  • Watch the training videos of spin coating (automatic), exposure (operation, and alignment), and development (automatic).
  • Study the equipment manuals. The manuals are available in LabManager.
  • Study the TPT process flows (first print, and alignment).

Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the section below.

Course Responsible

The Lithography Group at DTU Danchip.

Sign up for the course by e-mailing to lithography@danchip.dtu.dk.

Learning Objectives
  • Describe fundamental parts of lithographic processing in a cleanroom, design of process flows
  • Authorization to use spin coater, mask aligner, and developer at DTU Danchip
  • Calculate relevant process parameters
  • Analyze and apply your results of lithographic processing


Material for preparations and further information

Literature


Lecture videos


Slides from Lecture

Training videos


Manuals


Process Flows


The Dry Etch TPT

DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom.

The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.


Lithography Tool Package Training
Schedule

Theoretical part

  • The lecture has been replaced by videos that can be viewed at one's leisure.
  • A 1 hour "questions and exercises" session once or twice a month will be planned as needed (typically Fridays 09:30-10:30).
  • NEXT "questions and exercises" sessions: 31st of March, 21st of April, 28th of April, 19th of May

Practical part

  • A 4-5 hour training session 2-3 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 14:00).
  • NEXT training sessions: 5th of April, 26th of April, 3rd of May, 24th of May
Location

Theoretical part

  • The location of the "questions and exercises" session will be specified after signing up for the course.

Practical part

  • The training session takes place inside the cleanroom. The meeting point will be in front of the first equipment.
Qualified Prerequisites
  • Cleanroom safety course at DTU Danchip
  • Admission to the cleanroom must be obtained before the training session
Preparations

Before the "questions and exercises" session

  • Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus)
  • Watch the lecture videos (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos.

Before training session

  • Watch the training videos of spin coating (automatic), exposure (operation, and alignment), and development (automatic).
  • Study the equipment manuals. The manuals are available in LabManager.
  • Study the TPT process flows (first print, and alignment).

Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the section below.

Course Responsible

The Lithography Group at DTU Danchip.

Sign up for the course by e-mailing to lithography@danchip.dtu.dk.

Learning Objectives
  • Describe fundamental parts of lithographic processing in a cleanroom, design of process flows
  • Authorization to use spin coater, mask aligner, and developer at DTU Danchip
  • Calculate relevant process parameters
  • Analyze and apply your results of lithographic processing


Material for preparations and further information

Literature


Lecture videos


Slides from Lecture

Training videos


Manuals


Process Flows


The SEM TPT

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