LabAdviser/Courses: Difference between revisions
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===Material for preparations=== | ===Material for preparations and further information=== | ||
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'''<big>Literature</big>''' | |||
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf Franssila, 2010, Chapter 9: Optical Lithography] | |||
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch10/pdf Franssila, 2010, Chapter 10: Advanced Lithography] | |||
*[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals] | |||
*[http://www.microchemicals.com/downloads/application_notes.html Application Notes from MicroChemicals] | |||
'''<big>Lecture videos</big>''' | |||
*[http://podcast.llab.dtu.dk/index.php?id=302 Lecture videos] (7 videos, 2:41 hours in total) | |||
'''<big>Slides from Lecture</big>''' | |||
*[[:Media:Litho_Tool_Package_-_Introduction.pdf|TPT slides: Introduction]] | |||
*[[:Media:Litho_Tool_Package_-_Spin_coating.pdf|TPT slides: Spin Coating]] | |||
*[[:Media:Litho_Tool_Package_-_Exposure.pdf|TPT slides: UV Exposure]] | |||
*[[:Media:Litho_Tool_Package_-_Development.pdf|TPT slides: Development]] | |||
*[[:Media:Litho_Tool_Package_-_Post_processing.pdf|TPT slides: Post-processing]] | |||
*[[:Media:Litho_Tool_Package_-_Process_effects_and_examples.pdf|TPT slides: Process Effects and Examples]] | |||
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'''<big>Training videos</big>''' | |||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.055_Spin_Coater_GAMMA_UV-720p.mp4 Training Video: Automatic Spin Coater] | |||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.057_Manual_Spin_Coater_V2-720p.mp4 Training Video: Manual Spin Coater] | |||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part1_operation-720p.mp4 Training Video: UV Mask Aligner Part I (Operation)] | |||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part2_aligning-720p.mp4 Training Video: UV Mask Aligner Part II (Alignment)] | |||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.050_Developer_TMAH_UV-Lithography-720p.mp4 Training Video: Automatic Puddle Developer] | |||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.049_Developer_Manual-720p.mp4 Training Video: Manual Puddle Developer] | |||
'''<big>Manuals</big>''' | |||
*Automatic Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=359 Spin Coater: Gamma UV] | |||
*Manual Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=331 Spin Coater: Manual Standard Resists] | |||
*UV Mask Aligner: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=339 Aligner: MA6 - 2] or [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=44 KS Aligner] | |||
*Automatic Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=329 Developer: TMAH UV-lithography] | |||
*Manual Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=324 Developer: TMAH Manual] | |||
'''<big>Process Flows</big>''' | |||
*[[:Media:Process_Flow_TPT first print.pdf|TPT first print process flow]] | |||
*[[:Media:Process_Flow_TPT alignment.pdf|TPT alignment process flow]] | |||
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==The Dry Etch TPT== | ==The Dry Etch TPT== | ||
==The SEM TPT== | ==The SEM TPT== | ||