Specific Process Knowledge/Thin film deposition/Deposition of Platinum: Difference between revisions

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	==Platinum deposition ==		==Platinum deposition ==

	Platinum can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the different deposition equipment.		Platinum can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the different deposition equipment.