Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
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*<nowiki>#</nowiki>25 wafers of 100mm or 150nm and smaller samples in Si Etch 3 (fume hood) | *<nowiki>#</nowiki>25 wafers of 100mm or 150nm and smaller samples in Si Etch 3 (fume hood) | ||
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*<nowiki>#</nowiki>25 | *<nowiki>#</nowiki>#25 wafers of 100mm or 150nm mm wafers | ||
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*As many small samples as can be fitted on the 100mm carrier. | *As many small samples as can be fitted on the 100mm carrier. | ||