Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions
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=== Purpose === | === Purpose === | ||
The FLAT recipe is designed for quick coating of non-structured wafers. | The FLAT recipe is designed for quick coating of non-structured wafers. One should not expect to get good conformal coverage of nanostructures or nanometersized surface roughness. | ||
=== Process description === | === Process description === | ||