Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions
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{| border="2" cellpadding="2" cellspacing="1" | {| border="2" cellpadding="2" cellspacing="1" | ||
|+'''The FLAT process sequence''' | |||
|- | |- | ||
! rowspan="3" align="center"| O<sub>2</sub> plasma | ! rowspan="3" align="center"| O<sub>2</sub> plasma | ||