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==Wet etching of Titanium==
==Wet etching of Titanium==
[[Image:Stinkskab RR2.jpg|300x300px|thumb|Fume hood in cleanroom B-1. <br />Wet Etch of Titanium can take place in this pp tank or in a beaker in this fume hood]]
[[Image:Stinkskab RR2.jpg|250x250px|thumb|Fumehood(RCA) in cleanroom B-1. <br />Wet etching of titanium can be done in the "HF5%/BHF-dirty" bath in this fume hood]]
[[Image:Fumehood1-2.jpg|300x300px|thumb|Fume hood 1 and 2 for acids and bases in cleanroom D-3. <br />Wet etching of titanium can also be done in beakers with BHF or RCA1 mix in a beaker in one of these fume hoods]]


We have two solutions for wet titanium etching:
We have two solutions for wet titanium etching:
    
    
# BHF  
# BHF (wetbench or fumehood)
# Cold RCA1
# Cold RCA1 (fumehood)


Do it by making your own set up in a beaker in a fume hood - preferably in cleanroom B-1 or D-3. You can see the APV [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here]. BHF etching can also take place in the PP-etch bath in the fume hood in cleanroom B-1.
BHF etching can take place in the 'HF5%/BHF-dirty' bath inside Fumehood(RCA) in cleanroom B-1. This is the only ready made BHF bath where metals are allowed. You can also do the titanium etch in BHF or RCA1 mix by making your own solution in a beaker in Fumehood 01 or 02 in cleanroom D-3. You can see the APV [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here].




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|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
|'''Link to safety APV and KBA'''
|'''Link to safety APV and KBA'''
|[http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 see APV here]
|[http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 see APV here]
[http://kemibrug.dk/KBA/CAS/106534/?show_KBA=1&portaldesign=1 see KBA here]  
[http://kemibrug.dk/KBA/CAS/106534/?show_KBA=1&portaldesign=1 see KBA here]  
|[http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 see APV here]  
|[http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 see APV here]  
|-
|-


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