Specific Process Knowledge/Etch/Wet Platinum Etch: Difference between revisions
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==Wet Etching of Platinum== | ==Wet Etching of Platinum== | ||
[[Image: | [[Image:Fumehood1-2.jpg |300x300px|thumb|Wet Platinum Etch can be done in Fumehood 1 or 2 positioned in cleanroom D-3]] | ||
Platinum can be etched by the following wet etch: | Platinum can be etched by the following wet etch: | ||
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!Link to safety APV | !Link to safety APV | ||
|[http://labmanager | |[http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 see APV/Manual here]. | ||
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