Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions
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== The FLAT recipe == | == The FLAT recipe == | ||
The FLAT recipe is designed for coating of non-structured wafers. The amount of FDTS is delivered in one cycle (4 injections of FDTS at 0.400 Torr + 1 injection of water at 18 Torr) and the reaction time is 15 minutes. | === Purpose === | ||
The FLAT recipe is designed for quick coating of non-structured wafers. | |||
=== Process description === | |||
The amount of FDTS is delivered in one cycle (4 injections of FDTS at 0.400 Torr + 1 injection of water at 18 Torr) and the reaction time is 15 minutes. The total process time is some 22 minutes. | |||
=== Process sequence === | |||
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|+'''The FLAT recipe''' | |+'''The FLAT recipe''' | ||
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== The STAMP recipe == | == The STAMP recipe == | ||