Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF): Difference between revisions
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! BHF clean in D-3 (Oxide etch 1: BHF) | ! BHF clean in D-3 (Oxide etch 1: BHF) | ||
! BHF in D-3 (Oxide etch 2: BHF) | ! BHF (KOH) in D-3 (Oxide etch 2: BHF) | ||
! BHF in RCA Bench | ! BHF in RCA Bench | ||
! BHF in PP-bath | ! BHF in PP-bath | ||